Title :
Novel Fabrication Process Of Freestanding Metallic Microstructures Using Double Electroplating
Author :
Baek, Chang-Wook ; Kim, Yong-Kweon
Author_Institution :
Seoul National University
Keywords :
Electrodes; Fabrication; Gold; Microactuators; Microstructure; Nickel; Prototypes; Resists; Shape control; Strips;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.729982
