DocumentCode :
3306499
Title :
Monolithic integration of AT-cut resonators using artificial twin quartz plate
Author :
Nogi, S. ; Kamiyama, E. ; Ueoka, Y. ; Uno, T.
Author_Institution :
Kanagawa Inst. of Technol., Japan
Volume :
2
fYear :
1997
fDate :
5-8 Oct 1997
Firstpage :
1043
Abstract :
The monolithic integration of AT-cut quartz resonator arrays was investigated. To reduce the mechanical coupling between resonators formed on an AT-cut quartz plate, an x-axis inversion area was formed between the resonators. As the cutoff frequency of thickness shear wave in the x-axis inversion area is much higher than that for the AT-cut area, the thickness shear wave excited in the AT-cut area decays rapidly in the x-axis inversion area. The attenuation constant, α, of thickness shear wave in the x-axis inversion area is approximately given by α=23.2W/H [dB], where W and H are respectively the width of the x-axis inversion area and plate thickness. When the width W is 3H, the attenuation is about 70 dB. Therefore, almost complete separation between AT-cut resonators is obtained with very short width of the x-axis inversion area. Many resonators without mechanical coupling can be formed monolithically by the use of a lattice shaped x-axis inversion area
Keywords :
crystal resonators; quartz; ultrasonic arrays; AT-cut resonators; SiO2; artificial twin quartz plate; attenuation constant; mechanical coupling reduction; monolithic integration; quartz resonator arrays; thickness shear wave; x-axis inversion area; Attenuation; Chromium; Cutoff frequency; Electrodes; Lattices; Monolithic integrated circuits; Sensor arrays; Surface acoustic wave devices; Surface treatment; Thermal stresses;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE
Conference_Location :
Toronto, Ont.
ISSN :
1051-0117
Print_ISBN :
0-7803-4153-8
Type :
conf
DOI :
10.1109/ULTSYM.1997.661759
Filename :
661759
Link To Document :
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