Title :
Resonance Characteristics Of Micro Cantilever In Liquid
Author :
Hirai, Y. ; Mori, R. ; Kikuta, H. ; Kato, N. ; Inoue, Ken ; Tanaka, Y.
Author_Institution :
Osaka Prefecture University
Keywords :
Damping; Drag; Effective mass; Force measurement; Frequency; Optical films; Resonance; Thermal factors; Thermal force; Water;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.729983
