DocumentCode :
330653
Title :
Pattern Displacement Error Under Off-Axis Illumination
Author :
Seong, Nakgeuon ; Kye, Jongwook ; Kang, Hoyoung ; Moon, Jootae
Author_Institution :
Samsung Electronics Co., Ltd.
fYear :
1998
fDate :
13-16 July 1998
Firstpage :
95
Lastpage :
96
Keywords :
Diffraction; Displacement measurement; Error correction; Lenses; Lighting; Manufacturing; Moon; Optimized production technology; Research and development; Ultraviolet sources;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
Type :
conf
DOI :
10.1109/IMNC.1998.729987
Filename :
729987
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=330653
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