DocumentCode
330653
Title
Pattern Displacement Error Under Off-Axis Illumination
Author
Seong, Nakgeuon ; Kye, Jongwook ; Kang, Hoyoung ; Moon, Jootae
Author_Institution
Samsung Electronics Co., Ltd.
fYear
1998
fDate
13-16 July 1998
Firstpage
95
Lastpage
96
Keywords
Diffraction; Displacement measurement; Error correction; Lenses; Lighting; Manufacturing; Moon; Optimized production technology; Research and development; Ultraviolet sources;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location
Kyoungju, South Korea
Print_ISBN
4-930813-83-2
Type
conf
DOI
10.1109/IMNC.1998.729987
Filename
729987
Link To Document