DocumentCode
330655
Title
Determination Of The CD Dispersion And Proximity Bias Across The Lens Field By Electrical Linewidth Measurements
Author
Toublan, O. ; Boutin, D. ; Schiavone, P.
Author_Institution
France Telecom/CNET
fYear
1998
fDate
13-16 July 1998
Firstpage
98
Lastpage
99
Keywords
Character generation; Dispersion; Distributed power generation; Electric variables measurement; Lenses; Manufacturing processes; Proximity effect; Telecommunications; Test pattern generators; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location
Kyoungju, South Korea
Print_ISBN
4-930813-83-2
Type
conf
DOI
10.1109/IMNC.1998.729989
Filename
729989
Link To Document