Title :
Determination Of The CD Dispersion And Proximity Bias Across The Lens Field By Electrical Linewidth Measurements
Author :
Toublan, O. ; Boutin, D. ; Schiavone, P.
Author_Institution :
France Telecom/CNET
Keywords :
Character generation; Dispersion; Distributed power generation; Electric variables measurement; Lenses; Manufacturing processes; Proximity effect; Telecommunications; Test pattern generators; Testing;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.729989
