Title :
Measuring Odd Component Of Aberration Function Utilizing Alternating PSM
Author :
Nakao, Shuji ; Miyazaki, Junji ; Tsujita, Kouichirou ; Wakamiya, Wataru
Author_Institution :
Mitsubishi Electric Corporation
Keywords :
Area measurement; Electric variables measurement; Electrodes; Position measurement; Testing; Thickness measurement;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.729996
