Title :
Dynamic Response Of Acoustic Delay Line For Beam Lines Of SR Lithography System
Author_Institution :
Sumitomo Heavy Industries, Ltd.
Keywords :
Acoustic beams; Analytical models; Apertures; Degradation; Delay lines; Lithography; Mirrors; Protection; Strontium; Valves;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.729997
