DocumentCode

330661

Title

Dynamic Response Of Acoustic Delay Line For Beam Lines Of SR Lithography System

Author

Toyota, Eijiro

Author_Institution

Sumitomo Heavy Industries, Ltd.

fYear

1998

fDate

13-16 July 1998

Firstpage

111

Lastpage

112

Keywords

Acoustic beams; Analytical models; Apertures; Degradation; Delay lines; Lithography; Mirrors; Protection; Strontium; Valves;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.729997

Filename

729997