Title :
Fabrication Of Silicon Quantum Dots On Oxide And Nitride
Author :
Kim, Ilgweon ; Kim, Hyungsik ; Lee, Jongho ; Shin, Hyungcheol
Author_Institution :
KAIST
Keywords :
Chemicals; Fabrication; Quantum dots; Rough surfaces; Silicon; Substrates; Surface roughness; Surface treatment; Temperature; US Department of Transportation;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.730011