Title :
Iridium oxide reference electrodes for neurochemical sensing with MEMS microelectrode arrays
Author :
Franklin, Robert K. ; Johnson, Matthew D. ; Scott, Katharine A. ; Shim, Jun Ho ; Nam, Hakhyun ; Kipke, Daryl R. ; Brown, Richard B.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI
fDate :
Oct. 30 2005-Nov. 3 2005
Abstract :
We report for the first time a micromachined, silicon neural probe with an integrated iridium oxide (IrO) quasi reference electrode for neurochemical recordings. The probes have a 1.5 times 103 mum2 IrO reference electrode, a 1.5 times 103 mum2 Pt counter electrode, three circular Pt working electrodes, and three circular IrO electrodes for electrical recording. Several different electrode sizes (4 to 50 mum radius) were fabricated in order to study the effects of electrode size. In vitro evaluation of the probes demonstrated close correlation between results obtained using a Ag/AgCl reference electrode and the on-chip IrOx reference electrode
Keywords :
biochemistry; biological techniques; biomedical electrodes; chemical sensors; iridium compounds; microelectrodes; neurophysiology; silver; silver compounds; Ag-AgCl; IrO; MEMS microelectrode arrays; iridium oxide reference electrodes; neurochemical recordings; neurochemical sensing; on-chip referenceelectrodes; quasi reference electrode; silicon neural probe; Biological materials; Boron; Counting circuits; Delamination; Electrodes; In vivo; Microelectrodes; Micromechanical devices; Probes; Silicon;
Conference_Titel :
Sensors, 2005 IEEE
Conference_Location :
Irvine, CA
Print_ISBN :
0-7803-9056-3
DOI :
10.1109/ICSENS.2005.1597971
