DocumentCode
3306797
Title
Finite element analysis of micromachined finite ground CPW
Author
Xiaofeng, Yu ; Shunan, Zhong ; Xin, Lu ; Cheng, Yu
fYear
2002
fDate
17-19 Aug. 2002
Firstpage
709
Lastpage
712
Abstract
Membrane supported transmission line is a novel transmission structure introduced in the 1990s. By eliminating dielectric material under the signal line, it effectively reduced the loss. In this paper, the performance of single wafer membrane supported coplanar waveguide is investigated using finite element method. The characteristic impedance, attenuation and scattering parameters are computed.
Keywords
MMIC; S-parameters; coplanar waveguides; finite element analysis; integrated circuit modelling; losses; micromachining; MMIC; attenuation; characteristic impedance; finite element analysis; loss; membrane supported transmission line; micromachined finite ground CPW; scattering parameters; signal line; Biomembranes; Coplanar transmission lines; Coplanar waveguides; Dielectric losses; Dielectric materials; Dielectric substrates; Finite element methods; Frequency; Impedance; Transmission lines;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave and Millimeter Wave Technology, 2002. Proceedings. ICMMT 2002. 2002 3rd International Conference on
Print_ISBN
0-7803-7486-X
Type
conf
DOI
10.1109/ICMMT.2002.1187799
Filename
1187799
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