Title :
Fabrication of a Novel InAs Multiple Quantum Wire Transistor
Author :
Yamamoto, H. ; Maemoto, T. ; Ichiu, M. ; Sasa, S. ; Inoue, M.
Author_Institution :
Osaka Institute of Technology
Keywords :
Atomic force microscopy; Current measurement; Current-voltage characteristics; Effective mass; Etching; Fabrication; Resists; Scanning electron microscopy; Transconductance; Wire;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.730020