Title :
Fabrication Of Nanometer Scale Structure Using Thin Film Stress
Author :
Park, Dong-Il ; Hahm, Sung-Ho ; Lee, Jong-Hyun ; Lee, Jung-Hee
Author_Institution :
Kyungpook National University
Keywords :
Annealing; Compressive stress; Dry etching; Fabrication; Lithography; Nanostructures; Temperature control; Tensile stress; Thermal stresses; Transistors;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.730021
