Title :
Fabrication Of Periodic Si Nanostructure By Controlled Anodization
Author :
Nakagawa, T. ; Sugiyama, H. ; Koshida, N.
Author_Institution :
Tokyo University of Agriculture and Technology
Keywords :
Anodes; Current density; Fabrication; Hafnium; Magnetic fields; Morphology; Nanostructures; Periodic structures; Scanning electron microscopy; Silicon;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.730022
