DocumentCode

330685

Title

Fabrication Of Periodic Si Nanostructure By Controlled Anodization

Author

Nakagawa, T. ; Sugiyama, H. ; Koshida, N.

Author_Institution

Tokyo University of Agriculture and Technology

fYear

1998

fDate

13-16 July 1998

Firstpage

158

Lastpage

159

Keywords

Anodes; Current density; Fabrication; Hafnium; Magnetic fields; Morphology; Nanostructures; Periodic structures; Scanning electron microscopy; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.730022

Filename

730022