Title :
Novel Fabrication Of Comb Drive Actuator Using RIE Of Polysilicon And [110] Si Anisotropic Bulk Etching In KOH
Author :
Lim, Hyung-Taek ; Kim, Yong-Kweon
Author_Institution :
Seoul National University
Keywords :
Actuators; Anisotropic magnetoresistance; Electrodes; Fabrication; Fingers; Geometry; Passivation; Semiconductor films; Springs; Wet etching;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.730028
