DocumentCode :
330692
Title :
The Vapor Phase Deposition Of Fluorocarbon Films For The Prevention Of In-Use Stiction In Micromirrors
Author :
Lee, Sang-Ho ; Kwon, Myong-Jong ; Park, Jin-Goo ; Kim, Yong-Kweon ; Shin, Hyung-Jae
Author_Institution :
Hanyang University
fYear :
1998
fDate :
13-16 July 1998
Firstpage :
172
Lastpage :
173
Keywords :
Aluminum; Annealing; Fabrication; Goniometers; Micromechanical devices; Micromirrors; Organic chemicals; Plasma applications; Plasma chemistry; Plasma measurements;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
Type :
conf
DOI :
10.1109/IMNC.1998.730029
Filename :
730029
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=330692
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