Title :
A New Micromachining Technology Using
Author :
Lee, Sangwoo ; Park, Sangjun ; Cho, Dong-Il
Author_Institution :
Seoul National University
Keywords :
Anisotropic magnetoresistance; Bridges; Crystal microstructure; Crystallization; Crystallography; Micromachining; Passivation; Shape; Silicon; Wet etching;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.730030
