Title :
A CMOS Compatible Capacitive Silicon Accelerometer With Polysilicon Rib-Style Flexures
Author :
Kim, Seokyu ; Yee, Youngjoo ; Kim, Hyeoncheol ; Chun, Kukjin
Author_Institution :
Kong-Hwa Ltd.
Keywords :
Accelerometers; Biomembranes; CMOS process; Capacitance; Capacitors; Circuits; Electrodes; Etching; Fabrication; Silicon;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.730031
