مرکز منطقه ای اطلاع رساني علوم و فناوري - Fabrication Of Bimetallic Cantilevers For Chemical Sensors

DocumentCode :

330696

Title :

Fabrication Of Bimetallic Cantilevers For Chemical Sensors

Author :

Jung, M.Y. ; Kim, D.W. ; Choi, S.S. ; Kang, O.J. ; Suh, Y.D. ; Kuk, Y.

Author_Institution :

Sun Moon University

fYear :

1998

fDate :

13-16 July 1998

Firstpage :

180

Lastpage :

181

Keywords :

Chemical sensors; Detectors; Etching; Fabrication; Physics; Probes; Resonance; Resonant frequency; Temperature; Thermal sensors;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location :

Kyoungju, South Korea

Print_ISBN :

4-930813-83-2

Type :

conf

DOI :

10.1109/IMNC.1998.730033

Filename :

730033

Link To Document :