DocumentCode :
330697
Title :
Fabrication Of Silicon Micro-Probe For Vertical Probe Card Application
Author :
Kim, Yong-Dae ; Sim, Jun-Hwan ; Nam, Jae-Woo ; Lee, Jong-Hyun
Author_Institution :
Lumsonic Co. Ltd.
fYear :
1998
fDate :
13-16 July 1998
Firstpage :
182
Lastpage :
183
Keywords :
Annealing; Biomembranes; Components, packaging, and manufacturing technology; Electrical resistance measurement; Fabrication; Probes; Silicon; Temperature; Testing; Wet etching;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
Type :
conf
DOI :
10.1109/IMNC.1998.730034
Filename :
730034
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=330697
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