Title :
BTU - Berkeley Topography Utilities for Linking Topography and Impurity Profile Simulations
Author :
Wang, Robert H. ; Gabara, Andrej ; Neurether, A.
Author_Institution :
University of California, Berkeley
fDate :
31 May-1 Jun 1992
Keywords :
Capacitors; Etching; Information geometry; Joining processes; Laboratories; Mesh generation; Semiconductor impurities; Solid modeling; Surfaces; Vehicles;
Conference_Titel :
Numerical Modeling of Processes and Devices for Integrated Circuits, 1992. NUPAD IV. Workshop on
Print_ISBN :
0-7803-0516-7
DOI :
10.1109/NUPAD.1992.674109
