DocumentCode
3306975
Title
BTU - Berkeley Topography Utilities for Linking Topography and Impurity Profile Simulations
Author
Wang, Robert H. ; Gabara, Andrej ; Neurether, A.
Author_Institution
University of California, Berkeley
fYear
1992
fDate
31 May-1 Jun 1992
Firstpage
225
Lastpage
230
Keywords
Capacitors; Etching; Information geometry; Joining processes; Laboratories; Mesh generation; Semiconductor impurities; Solid modeling; Surfaces; Vehicles;
fLanguage
English
Publisher
ieee
Conference_Titel
Numerical Modeling of Processes and Devices for Integrated Circuits, 1992. NUPAD IV. Workshop on
Print_ISBN
0-7803-0516-7
Type
conf
DOI
10.1109/NUPAD.1992.674109
Filename
674109
Link To Document