Title :
Micromachined Optical Components Integrated With Photodiode
Author :
Sasaki, M. ; Arai, Y. ; Takebe, H. ; Hane, K.
Author_Institution :
Tohoku University
Keywords :
Image sensors; Laser beams; Laser feedback; Mechatronics; Monitoring; Optical devices; Photoconductivity; Photodiodes; Precision engineering; Shape memory alloys;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.730039
