DocumentCode :
330706
Title :
Totally Different Sputter Damage Profiles Of Metal And Si Single Crystal Smrfaccs Investigated By Medium Energy Ion Scattering Spectroscopy
Author :
Dae Won Moon ; Ha, Yongho ; Kim, Hyun Kong ; Kim, Schoon
Author_Institution :
KRISS
fYear :
1998
fDate :
13-16 July 1998
Firstpage :
200
Lastpage :
201
Keywords :
Atomic beams; Atomic layer deposition; Atomic measurements; Crystallization; Electrons; Ion beams; Scattering; Spectroscopy; Sputter etching; Sputtering;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
Type :
conf
DOI :
10.1109/IMNC.1998.730043
Filename :
730043
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=330706
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