DocumentCode
330706
Title
Totally Different Sputter Damage Profiles Of Metal And Si Single Crystal Smrfaccs Investigated By Medium Energy Ion Scattering Spectroscopy
Author
Dae Won Moon ; Ha, Yongho ; Kim, Hyun Kong ; Kim, Schoon
Author_Institution
KRISS
fYear
1998
fDate
13-16 July 1998
Firstpage
200
Lastpage
201
Keywords
Atomic beams; Atomic layer deposition; Atomic measurements; Crystallization; Electrons; Ion beams; Scattering; Spectroscopy; Sputter etching; Sputtering;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location
Kyoungju, South Korea
Print_ISBN
4-930813-83-2
Type
conf
DOI
10.1109/IMNC.1998.730043
Filename
730043
Link To Document