• DocumentCode
    330710
  • Title

    Study On Microdefect Characteristics Analysis By RTA in 1MeV P Ion Implantation for High Memory Devices

  • Author

    Roh, Byeong-Gyu ; Kang, Hee-Won ; Cho, So-Haeng ; Hong, Sung-Pyo ; Eum, Keom-Yong ; Oh, Hwan-Sool

  • Author_Institution
    Kon-Kuk University
  • fYear
    1998
  • fDate
    13-16 July 1998
  • Firstpage
    208
  • Lastpage
    209
  • Keywords
    Analytical models; Fabrication; Furnaces; Ion implantation; Mass spectroscopy; Optimization methods; Simulated annealing; Temperature distribution; Transmission electron microscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 1998 International
  • Conference_Location
    Kyoungju, South Korea
  • Print_ISBN
    4-930813-83-2
  • Type

    conf

  • DOI
    10.1109/IMNC.1998.730047
  • Filename
    730047
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=330710