Title :
Adaptive Grid for Monte Carlo Simulation of Ion Implantation
Author :
Stippel, H. ; Halama, S. ; Hobler, G. ; Wimmer, K. ; Selberherr, S.
Author_Institution :
Technical University Vienna
fDate :
31 May-1 Jun 1992
Keywords :
Algorithm design and analysis; Analytical models; Equations; Ion implantation; Mesh generation; Microelectronics; Mirrors; Tellurium; Workstations;
Conference_Titel :
Numerical Modeling of Processes and Devices for Integrated Circuits, 1992. NUPAD IV. Workshop on
Print_ISBN :
0-7803-0516-7
DOI :
10.1109/NUPAD.1992.674110
