DocumentCode

3307156

Title

Adaptive Grid for Monte Carlo Simulation of Ion Implantation

Author

Stippel, H. ; Halama, S. ; Hobler, G. ; Wimmer, K. ; Selberherr, S.

Author_Institution

Technical University Vienna

fYear

1992

fDate

31 May-1 Jun 1992

Firstpage

231

Lastpage

236

Keywords

Algorithm design and analysis; Analytical models; Equations; Ion implantation; Mesh generation; Microelectronics; Mirrors; Tellurium; Workstations;

fLanguage

English

Publisher

ieee

Conference_Titel

Numerical Modeling of Processes and Devices for Integrated Circuits, 1992. NUPAD IV. Workshop on

Print_ISBN

0-7803-0516-7

Type

conf

DOI

10.1109/NUPAD.1992.674110

Filename

674110