Effect Of Internal Surface Bondings On The Etching Of SiO₂ Aerogel Film

Author

Wang, Seok-Joo ; Park, Hyung-Ho

Author_Institution

Yonsei University

fYear

1998

fDate

13-16 July 1998

Firstpage

244

Lastpage

245

Keywords

Bonding; Chemicals; Delay; Etching; Hydrogen; Plasma applications; Plasma chemistry; Plasma properties; Polymer films; Spectroscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

DOI

10.1109/IMNC.1998.730063

Filename

730063

Link To Document