Title :
Effect Of Internal Surface Bondings On The Etching Of SiO2 Aerogel Film
Author :
Wang, Seok-Joo ; Park, Hyung-Ho
Author_Institution :
Yonsei University
Keywords :
Bonding; Chemicals; Delay; Etching; Hydrogen; Plasma applications; Plasma chemistry; Plasma properties; Polymer films; Spectroscopy;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.730063
