DocumentCode

330726

Title

A Study On The Deposition Of a-Si:H Films For High Photoconductivity

Author

Kang, Moonsang ; Koo, Yongseo ; An, Chul

Author_Institution

Induk Institute of Technology

fYear

1998

fDate

13-16 July 1998

Firstpage

246

Lastpage

247

Keywords

Bonding; Conductivity; Hydrogen; Optical films; Photoconductivity; Photonic band gap; Plasma chemistry; Plasma density; Plasma properties; Plasma temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.730064

Filename

730064