DocumentCode

330731

Title

New HF Linear Ion Source For Industrial Applications

Author

Seok-Keun Koh ; Won-Kook Choi ; Hyung-Jin Jung ; Bougrov, G. ; Kralkina, E. ; Kondranin, S. ; Pavlov, V.

Author_Institution

Korea Institute of Science and Technology

fYear

1998

fDate

13-16 July 1998

Firstpage

256

Lastpage

256

Keywords

Acceleration; Chemical technology; Discharges; Electrodes; Electrostatics; Ion beams; Ion sources; Materials science and technology; Optical surface waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.730069

Filename

730069