Nanofabrication Using Scanning Near-Field Optical Microscopy

Author

Mitsuoka, Y. ; Nakajima, K. ; Chiba, N. ; Muramatsu, H. ; Ataka, T.

Author_Institution

Seiko Instruments Inc.

fYear

1998

fDate

13-16 July 1998

Firstpage

279

Lastpage

280

Keywords

Apertures; Atom optics; Atomic force microscopy; Lithography; Nanofabrication; Optical films; Optical microscopy; Optical sensors; Probes; Resists;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

DOI

10.1109/IMNC.1998.730081

Filename

730081

Link To Document