• DocumentCode
    330745
  • Title

    Sub-Wavelength Pattern Transfer By Near Field Photo-Lithography

  • Author

    Takahito, One ; Mika, Ohtomo ; Esashi, Masayoshi

  • Author_Institution
    Tohoku University
  • fYear
    1998
  • fDate
    13-16 July 1998
  • Firstpage
    283
  • Lastpage
    284
  • Keywords
    Apertures; Atomic force microscopy; Biomembranes; Glass; Lithography; Optical films; Optical microscopy; Optical surface waves; Resists; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 1998 International
  • Conference_Location
    Kyoungju, South Korea
  • Print_ISBN
    4-930813-83-2
  • Type

    conf

  • DOI
    10.1109/IMNC.1998.730083
  • Filename
    730083
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=330745