Title :
Atomic-Step-Networks For Nanopatterning On Si Surfaces
Author :
Ogino, T. ; Homma, Y. ; Hibino, H. ; Kunii, Y. ; Omi, H.
Author_Institution :
Nippon Telegraph and Telephone Corporation
Keywords :
Annealing; Atomic layer deposition; Furnaces; Motion control; Nanopatterning; Nanostructures; Quantum dots; Telegraphy; Telephony;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.730089
