Title :
Selectively Formed InAs Quantum Dot Arrays For Device Application
Author :
Hahn, Cheol Koo ; Park, Young Ju ; Park, Kyung Hyun ; Hyun, Chan Kyung ; Kim, Eun Kyu ; Min, Suk-Ki ; Park, Jung Ho
Author_Institution :
Korea Institute of Science and Technology
Keywords :
Atomic force microscopy; Atomic layer deposition; Fabrication; Gallium arsenide; Materials science and technology; Molecular beam epitaxial growth; Quantum dots; Scanning electron microscopy; Substrates; US Department of Transportation;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.730091