DocumentCode

330755

Title

In-Situ Observation Of FIB Micropatterning To Semiconductors

Author

Tanaka, Miyoko ; Furuya, Kazuo ; Saito, Tetsuya

Author_Institution

National Research Institute for Metals

fYear

1998

fDate

13-16 July 1998

Firstpage

303

Lastpage

304

Keywords

Amorphous materials; Electron beams; Focusing; Gallium arsenide; Instruments; Ion beams; Laser excitation; Production; Semiconductor materials; Silicon carbide;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.730093

Filename

730093