DocumentCode
330768
Title
A High Performance Polycrystalline Silicon Thin Film Transistor Using A Metal Induced Crystallization With A Ni Solution
Author
Yoon, Soo Young ; Kim, Sung Ki ; Oh, Jae Young ; Choi, Young Jin ; Shon, Woo Sung ; Kim, Chae Ok ; Jang, Jin
Author_Institution
Kyung Hee University
fYear
1998
fDate
13-16 July 1998
Firstpage
331
Lastpage
332
Keywords
Annealing; Contamination; Crystallization; Microwave integrated circuits; Optical films; Physics; Plasma temperature; Silicon; Temperature sensors; Thin film transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location
Kyoungju, South Korea
Print_ISBN
4-930813-83-2
Type
conf
DOI
10.1109/IMNC.1998.730107
Filename
730107
Link To Document