DocumentCode :
330771
Title :
Quantitative Measuring Ray Shift Aspect Of Coma Aberration Utilizing Electrical Probe With Zero-Crossing Method
Author :
Nakao, Shuji ; Tsujita, Kouichirou ; Wakamiya, Wataru
Author_Institution :
ULSI Laboratory, Mitsubishi Electric Corporation
fYear :
1998
fDate :
13-16 July 1998
Firstpage :
336
Lastpage :
337
Keywords :
Distortion measurement; Electric variables measurement; Electrical resistance measurement; Laboratories; Optical distortion; Optical films; Probes; Size measurement; Ultra large scale integration; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
Type :
conf
DOI :
10.1109/IMNC.1998.730110
Filename :
730110
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=330771
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