Micro-machined “snap-together” rectangular waveguide for terahertz circuits

A novel technique for micro-machining terahertz frequency rectangular waveguide components is reported. Known as “T-guide”, these precision structures are fabricated in two halves with locating pins on one half and corresponding holes on the other such that they can be snapped together. The resulting waveguides have excellent surface finish, are physically robust and are cheap and easy to manufacture. S-parameter measurements in the frequency range 75 GHz to 110 GHz are reported for the first time for these structures which show that they exhibit lower loss than previously reported micro-machined rectangular waveguides. The “snap together” feature facilitates the incorporation of active devices into these waveguides