Title :
Diamond microstructures
Author_Institution :
Dept. of Mater. Sci., Uppsala Univ., Sweden
Abstract :
Synthetic polycrystalline diamond microstructuring and microstructures are presented. A short review are made on the research up to today with an emphasis on the recent research at the Angstrom Laboratory, Uppsala University. It is concluded that microstructures for field emitting, microfluidic, and moulds for metallic microreplication are closest to commercialization. Much research are still needed for low-cost microstructures in diamond
Keywords :
diamond; micromachining; C; field emitter; metallic microreplication; microfluidic device; microsystem technology; mould; synthetic polycrystalline diamond microstructure; Chemical technology; Conducting materials; Crystalline materials; Crystallization; Microstructure; Optical films; Optical refraction; Optical saturation; Semiconductor materials; Thermal resistance;
Conference_Titel :
Semiconductor Conference, 1998. CAS '98 Proceedings. 1998 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-4432-4
DOI :
10.1109/SMICND.1998.732277
