Title :
Experimental evidence of giant fluctuations in the electrical response of very thin SnO2 films
Author :
Cobianu, Cornel ; Mihaila, Mihai ; Bocioaca, Liviu ; Lungu, Dan ; Savaniu, Cristian ; Arnautu, Antonela ; Iorgulescu, Raluca
Author_Institution :
Nat. Inst. of Microtechnol., Bucharest, Romania
Abstract :
A simple comb structure provided with p+ silicon temperature sensor and Al electrodes predeposited on Si/SiO2 substrates has been used to study the room temperature time-dependent voltage response of undoped and Sb doped SnO2 sol-gel derived thin films as a function of injected constant current. Giant voltage fluctuations were revealed for input currents higher than a certain threshold that varied as a function of film technology and surface topography. The results were qualitatively interpreted in terms biased percolation model
Keywords :
electrical conductivity; percolation; semiconductor materials; semiconductor thin films; sol-gel processing; tin compounds; Al electrode; Sb doping; Si/SiO2 substrate; SnO2; SnO2 thin film; SnO2:Sb; comb structure; current injection; electrical response; giant fluctuations; p+ silicon temperature sensor; percolation; sol-gel synthesis; surface topography; time-dependent voltage response; Electric resistance; Electrodes; Fabrication; Fluctuations; Packaging; Semiconductor films; Silicon; Temperature dependence; Temperature sensors; Threshold voltage;
Conference_Titel :
Semiconductor Conference, 1998. CAS '98 Proceedings. 1998 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-4432-4
DOI :
10.1109/SMICND.1998.732346
