Title :
Non-destructive AC permeability measurement of full wafer soft magnetic films
Author :
Gieraltowski, J. ; Loaec, J. ; Le Gall, H.
Author_Institution :
Universite de Bretagne Occidentale
Keywords :
Magnetic films; Permeability measurement;
Conference_Titel :
Magnetics Conference, 1989. Digests of INTERMAG '89., International
Conference_Location :
Washington, DC, USA
DOI :
10.1109/INTMAG.1989.690366