Title :
Grating light valve based on high reflectance micro-beams: Design by simulation
Author :
Florin, Comanescu Constantin ; Tibeica, Catalin ; Purica, Munizer ; Schiopu, Paul
Author_Institution :
Univ. Politeh. of Bucharest, Bucharest, Romania
Abstract :
In this paper are presented the results of grating light valve (GLV) structure simulation using Coventorware software in order to maximize the intensity of diffracted light in the ±1 diffraction orders. Was simulated a GLV element which consists from 6 high reflective micro-beams suspended above a silicon substrate and which are electrostatically actuated. By simulation are optimized the length, width and thicknesses of the micro-beam and the space between micro-beams to obtaining a deflection of λ/4 at moderate value of applied voltage.
Keywords :
diffraction gratings; electro-optical modulation; electro-optical switches; integrated optoelectronics; light diffraction; light reflection; light valves; micro-optomechanical devices; Coventorware software; Si; diffracted light; electrostatically actuated microbeams; grating light valve structure simulation; high reflectance microbeams; optical design; silicon substrate; Aluminum; Diffraction; Diffraction gratings; Gratings; Silicon; Substrates; Valves; diffraction; electrostatic actuation; grating light valve; micro-beam; phase grating;
Conference_Titel :
Semiconductor Conference (CAS), 2010 International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4244-5783-0
DOI :
10.1109/SMICND.2010.5650239
