Title :
Fabrication and testing of thermoelectric thin film devices
Author :
Wagner, Andrew V. ; Foreman, Ronald J. ; Summers, Leslie J. ; Barbee, Troy W., Jr. ; Farmer, Joseph C.
Author_Institution :
Dept. of Chem. & Mater. Sci., Lawrence Livermore Nat. Lab., CA, USA
Abstract :
Two thin-film thermoelectric devices are experimentally demonstrated. The relevant thermal loads on the cold junction of these devices are determined. The analytical form of the equation that describes the thermal loading of the device enables us to model the performance based on the independently measured electronic properties of the films forming the devices. This model elucidates which parameters determine device performance, and how they can be used to maximize performance.
Keywords :
sputtered coatings; testing; thermoelectric devices; thin film devices; cold junction; device performance; electronic properties; fabrication; magnetron sputtering; performance maximisation; testing; thermal loads; thin-film thermoelectric devices; Cooling; Fabrication; Optical films; Semiconductor materials; Semiconductor thin films; Sputtering; Testing; Thermoelectric devices; Thermoelectricity; Thin film devices;
Conference_Titel :
Thermoelectrics, 1996., Fifteenth International Conference on
Conference_Location :
Pasadena, CA, USA
Print_ISBN :
0-7803-3221-0
DOI :
10.1109/ICT.1996.553316