Title :
Novel technique for monolithic integration of microlensed resonant detectors and vertical cavity lasers
Author :
Louderback, D.A. ; Sjolund, O. ; Hegblom, E.R. ; Ko, J. ; Coldren, L.A.
Author_Institution :
Dept. of Electr. & Comput. Eng., California Univ., Santa Barbara, CA, USA
Abstract :
Summary form only given. We demonstrate a novel design that allows the fabrication of photodetectors and vertical-cavity lasers with integrated microlenses from a single epitaxial growth by selective oxidation of the bottom mirror.
Keywords :
epitaxial growth; integrated optoelectronics; laser mirrors; microlenses; optical fabrication; photodetectors; semiconductor growth; surface emitting lasers; bottom mirror; microlensed resonant detectors; monolithic integration; selective oxidation; single epitaxial growth; vertical cavity lasers; Epitaxial growth; Lenses; Microoptics; Monolithic integrated circuits; Optical design; Optical device fabrication; Oxidation; Photodetectors; Resonance; Vertical cavity surface emitting lasers;
Conference_Titel :
Broadband Optical Networks and Technologies: An Emerging Reality/Optical MEMS/Smart Pixels/Organic Optics and Optoelectronics. 1998 IEEE/LEOS Summer Topical Meetings
Conference_Location :
Monterey, CA, USA
Print_ISBN :
0-7803-4953-9
DOI :
10.1109/LEOSST.1998.690390
