A temperature compensation algorithm of piezoresistive pressure sensor and software implementation

Author

Dacheng Xu ; Yongtao Liu

Author_Institution

Dept. of Micro-nano Sensor, Univ. of Soochow, Suzhou, China

fYear

2013

fDate

4-7 Aug. 2013

Firstpage

1738

Lastpage

1742

Abstract

The thermal zero drift and thermal sensitivity drift of piezoresistive pressure sensor plays a great role in the total error, so how to make this kind of error get effective compensation is significant for its performance. It is an effective method that establishing high-order temperature compensation model for silicon piezoresistive sensors and compensating temperature error, and put forward a fitting coefficient adjustment method on this model basis. The paper has been realized the calculation of temperature compensation by Matlab GUI. Experimental results show that nonlinearity error is less than 0.4% F.S.

Keywords

compensation; mathematics computing; piezoelectric transducers; pressure sensors; Matlab GUI; nonlinearity error; piezoresistive pressure sensor; software implementation; temperature compensation algorithm; thermal sensitivity drift; thermal zero drift; Fitting; Mathematical model; Piezoresistance; Software; Temperature distribution; Temperature sensors; algorithm; piezoresistive pressure sensor; temperature compensation coefficient;

fLanguage

English

Publisher

ieee

Conference_Titel

Mechatronics and Automation (ICMA), 2013 IEEE International Conference on

Conference_Location

Takamatsu

Print_ISBN

978-1-4673-5557-5

Type

conf

DOI

10.1109/ICMA.2013.6618178

Filename

6618178