Title :
Design and simulation of a integrated Mach-Zehnder interferometer sensor
Author :
Ionita, Mihaela Roxana ; Kusko, Mihai
Author_Institution :
Politeh. Univ. of Bucharest, Bucharest, Romania
Abstract :
In this paper we present the simulation results of a proposed integrated Mach-Zehnder interferometer sensor. The sensor can be fabricated from polymeric materials like SU8 and PMMA using the e-beam lithography. The numerical simulations consider the detection of the analysis medium refractive index ranging from 1.33 to 1.36.
Keywords :
Mach-Zehnder interferometers; electron beam lithography; optical fabrication; optical sensors; refractive index measurement; analysis medium refractive index; e-beam lithography; integrated Mach-Zehnder interferometer sensor; polymeric materials; Indexes; Lithography; Materials; Numerical models; Optical waveguides; Refractive index; Sensors;
Conference_Titel :
Semiconductor Conference (CAS), 2010 International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4244-5783-0
DOI :
10.1109/SMICND.2010.5650448
