High temperature SOI CMOS technology and circuit realization for applications up to 300°C

Today an increasing number of applications in fields like power electronics or sensor signal conditioning are demanding for integrated circuits supporting an extended temperature range. Mixed signal circuits featuring analog circuitry, analog to digital converters as well as embedded microcontrollers and on-chip memories are requested to operate up to 300°C or even more. This paper outlines technological and design specific challenges as well as limiting factors for integrated circuits at high temperatures realized in a Silicon-on-Insulator (SOI) CMOS technology. The technology and circuit design techniques are presented based on a complex design example. Finally performance parameters of basic building blocks measured up to 300°C are shown.