DocumentCode
331837
Title
MEMS for applications in fiber optic communication
Author
Marxer, C. ; de Rooij, N.F.
Author_Institution
Inst. of Microtechnol., Neuchatel Univ., Switzerland
Volume
1
fYear
1998
fDate
1-4 Dec 1998
Firstpage
26
Abstract
We discuss three MEMS based components for fiber optic communication: a reflective modulator, a 2×2 switch and a 4 channel variable attenuator. All devices take advantage of the silicon micromachining technology not only for their functionality but also to allow self aligned positioning of the single mode fibers
Keywords
electro-optical modulation; electro-optical switches; micro-optics; micromechanical devices; optical communication equipment; optical losses; silicon; 2×2 switch; 4 channel variable attenuator; MEMS applications; MEMS based components; Si micromachining technology; fiber optic communication; reflective modulator; self aligned positioning; silicon micromachining technology; single mode fibers; Insertion loss; Micromechanical devices; Optical fiber communication; Optical fiber polarization; Optical fibers; Optical losses; Optical modulation; Optical switches; Optical waveguides; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society Annual Meeting, 1998. LEOS '98. IEEE
Conference_Location
Orlando, FL
Print_ISBN
0-7803-4947-4
Type
conf
DOI
10.1109/LEOS.1998.737715
Filename
737715
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