Title :
Polylithic integration of true single chip radio using quartz-on-silicon wafer
Author_Institution :
MICROS Res. Centre, Korea Adv. Inst. of Sci. & Technol., Seoul, South Korea
Abstract :
Summary form only given. PLIC (polylithic integrated circuit) technology allows one to fabricate heterogeneous systems on a single wafer. In PLIC, various crystals are stacked vertically and different devices having optimum performance on each crystal, are fabricated then connected on the same wafer, all using IC fabrication technology. Then complete system is finally obtained as a single chip after dicing. Thus drastic reduction in cost and size and great improvement in performance and reliability are expected. In this presentation, PLIC using QoS (Quartz-on-Silicon) is taken as an example to demonstrate the feasibility of a true single chip radio, where RF and digital circuits, antenna, and electroacoustic filters are integrated on the same wafer
Keywords :
integrated circuit reliability; integrated circuit technology; mixed analogue-digital integrated circuits; radio equipment; IC fabrication technology; PLIC; QoS; RF/digital circuits; SiO2-Si; electroacoustic filters; heterogeneous systems; polylithic integrated circuit; quartz-on-silicon; reliability; true single chip radio; Costs; Crystals; Fabrication; Filters; Integrated circuit technology; Mass production; Optimized production technology; Radio frequency; Semiconductor device modeling; Transistors;
Conference_Titel :
Electron Devices and Materials, 2001. Proceedings. 2nd Annual Siberian Russian Student Workshop on
Conference_Location :
Erlagol, Altai
Print_ISBN :
5-7782-0347-0
DOI :
10.1109/SREDM.2001.939142