Title :
Poly-Si thin film transistors fabricated on plastic substrates
Author :
Carey, P.G. ; Smith, P.M. ; Theiss, S.D. ; Wickboldt, P. ; Sigmon, T.W. ; Tung, Y.J. ; King, T.-J.
Author_Institution :
Lawrence Livermore Nat. Lab., CA, USA
Abstract :
Summary form only given. We report the thin film transistor (TFT) fabrication and laser-doping processes for different low-temperature gate dielectrics and doping techniques. Electrical properties of both TFT and test/calibration devices are presented
Keywords :
calibration; flat panel displays; optical fabrication; optical testing; silicon; substrates; thin film transistors; Si; calibration devices; doping techniques; electrical properties; laser-doping processes; low-temperature gate dielectrics; plastic substrates; poly-Si thin film transistors fabrication; test devices; Crystallization; Doping; Flat panel displays; Plasma temperature; Plastics; Positron emission tomography; Pulsed laser deposition; Silicon; Substrates; Thin film transistors;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1998. LEOS '98. IEEE
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-4947-4
DOI :
10.1109/LEOS.1998.737765
