Dielectric properties of thin polyimide films

Author

Rusu, Radu-Dan ; Damaceanu, Mariana-Dana ; BRUMA, Maria ; Müller, Alexandru

Author_Institution

Petru Poni Inst. of Macromolecular Chem., Iasi, Romania

Volume

02

fYear

2010

fDate

11-13 Oct. 2010

Firstpage

363

Lastpage

366

Abstract

Heterocyclic polyimides based on bis (ketonaphthalic) dianhydrides and aromatic diamines containing oxadiazole rings were prepared and their dielectric properties were investigated. The dielectric constant values, measured at room temperature and in the frequency domain of 1 Hz-1MHz, were in the range of 2.7-3.1, being lower or comparable with those of commercial polyimide film Kapton which is one of the most used dielectric materials in microelectronic applications. The dielectric loss values are also low, in the same range with those of Kapton.

Keywords

dielectric losses; dielectric thin films; permittivity; polymer films; thin films; aromatic diamines; bis(ketonaphthalic) dianhydrides; dielectric constant; dielectric loss; dielectric properties; frequency 1 Hz to 1 MHz; heterocyclic polyimides; microelectronic applications; oxadiazole rings; polyimide thin films; temperature 293 K to 298 K; Dielectric constant; Films; Frequency measurement; Polyimides; Temperature measurement; heterocyclic polyimides; low dielectric constant; low dielectric loss;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference (CAS), 2010 International

Conference_Location

Sinaia

ISSN

1545-827X

Print_ISBN

978-1-4244-5783-0

Type

conf

DOI

10.1109/SMICND.2010.5650658

Filename

5650658