Title :
All solid-state, single-frequency 193-nm laser system for deep-UV metrology
Author :
Hamilton, C.E. ; Doughty, C.B. ; Roper, P.M. ; Mead, R.D. ; Tidwell, S.C.
Author_Institution :
Aculight Corp., Bothell, WA, USA
Abstract :
We describe a 60-Hz all-solid-state 193-nm Nd:YAG laser system to be used for deep-UV metrology. The basic approach for generating 193 nm is to sum frequency mix the fifth harmonic of an injection-seeded Nd:YAG laser with a single-frequency 2-μm beam. A KTiOPO4 optical parametric oscillator is used
Keywords :
laser frequency stability; laser transitions; neodymium; optical harmonic generation; optical parametric oscillators; optical pumping; solid lasers; 193 nm; 2 mum; KTiOPO4; KTiOPO4 optical parametric oscillator; Nd:YAG laser system; YAG:Nd; YAl5O12:Nd; all solid-state single-frequency 193-nm laser system; deep-UV metrology; fifth harmonic o; frequency mix; injection-seeded Nd:YAG laser; single-frequency 2-μm beam; Diode lasers; Frequency; Laser beams; Laser stability; Metrology; Nonlinear optics; Optical harmonic generation; Optical pumping; Solid lasers; Solid state circuits;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1998. LEOS '98. IEEE
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-4947-4
DOI :
10.1109/LEOS.1998.737860
