Cantilever-in-cantilever micromachined pressure sensors fabricated in CMOS technology

Author

Brown, Keith B. ; Allegretto, Walter ; Vermuelen, F.E. ; Lawson, Ron P W ; Robinson, Alexander M.

Author_Institution

Dept. of Electr. & Comput. Eng., Alberta Univ., Edmonton, Alta., Canada

Volume

3

fYear

1999

fDate

9-12 May 1999

Firstpage

1686

Abstract

The resonance characteristics of an oscillating microcantilever are modified due to the changing damping effects as the ambient air pressure varies. Such a device may be employed as a pressure sensor. We have designed modeled, and tested a CMOS micromachined magnetically actuated cantilever pressure sensor. Five variations of a cantilever-in-cantilever (CIC) device were tested for changes in amplitude of oscillation, resonant frequency, quality factor, damping relation, and actuating current required as the pressure was varied from 15 to 1450 Torr.

Keywords

CMOS integrated circuits; Q-factor; damping; micromachining; microsensors; pressure sensors; 15 to 1450 torr; CMOS technology; cantilever-in-cantilever device; damping relation; fabrication; magnetic actuation; micromachining; oscillation amplitude; pressure sensor; quality factor; resonant frequency; Arm; CMOS technology; Damping; Magnetic resonance; Magnetic sensors; Piezoresistive devices; Pressure measurement; Resonant frequency; Sensor phenomena and characterization; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical and Computer Engineering, 1999 IEEE Canadian Conference on

Conference_Location

Edmonton, Alberta, Canada

ISSN

0840-7789

Print_ISBN

0-7803-5579-2

Type

conf

DOI

10.1109/CCECE.1999.804971

Filename

804971